diff --git a/cpu/efm32/Makefile b/cpu/efm32/Makefile
index f70451361e..519aa8138e 100644
--- a/cpu/efm32/Makefile
+++ b/cpu/efm32/Makefile
@@ -1,6 +1,26 @@
 MODULE = cpu
 
 # add a list of subdirectories, that should also be build
-DIRS = periph families/$(EFM32_FAMILY) $(RIOTCPU)/cortexm_common
+DIRS += periph
+DIRS += $(RIOTCPU)/cortexm_common
+
+ifneq (,$(filter cpu_efm32gg,$(USEMODULE)))
+  DIRS += families/efm32gg
+endif
+ifneq (,$(filter cpu_efm32lg,$(USEMODULE)))
+  DIRS += families/efm32lg
+endif
+ifneq (,$(filter cpu_efm32pg1b,$(USEMODULE)))
+  DIRS += families/efm32pg1b
+endif
+ifneq (,$(filter cpu_efm32pg12b,$(USEMODULE)))
+  DIRS += families/efm32pg12b
+endif
+ifneq (,$(filter cpu_efr32mg1p,$(USEMODULE)))
+  DIRS += families/efr32mg1p
+endif
+ifneq (,$(filter cpu_efr32mg12p,$(USEMODULE)))
+  DIRS += families/efr32mg12p
+endif
 
 include $(RIOTBASE)/Makefile.base