diff --git a/cpu/efm32/Makefile.include b/cpu/efm32/Makefile.include
index 3d49f9b6fa..1dc766b3d2 100644
--- a/cpu/efm32/Makefile.include
+++ b/cpu/efm32/Makefile.include
@@ -1,17 +1,21 @@
 include $(RIOTCPU)/efm32/efm32-info.mk
 
+# HACK: here we would want to look into USEMODULE to include Makefile.include
+# but since Makefile.dep is still resolved after Makefile.include we can't do
+# something like `$(filter cpu_efm32%,$(USEMODULE))`. This is why we use
+# `cpu_$(CPU_FAM)` for something that is MODULE related.
+include $(RIOTCPU)/efm32/families/$(CPU_FAM)/Makefile.include
+
+ifeq (,$(EFM32_HEADER))
+  $(error Header file for $(CPU_MODEL) is missing)
+endif
+
 # the size of riotboot on the EFM32 exceeds the default value
 RIOTBOOT_LEN ?= 0x2000
 
 # the em_device.h header requires a global define with the cpu model
 CFLAGS += -D$(call uppercase_and_underscore,$(CPU_MODEL))
 
-# vectors.o is provided by 'cpu_$(EFM32_FAMILY)' and not by 'cpu'
-VECTORS_O := $(BINDIR)/cpu_$(EFM32_FAMILY)/vectors.o
-
-# include vendor device headers
-INCLUDES += -I$(RIOTCPU)/efm32/families/$(EFM32_FAMILY)/include/vendor
-
 # include cortexm_common
 LINKER_SCRIPT = cortexm.ld
 
diff --git a/cpu/efm32/efm32-info.mk b/cpu/efm32/efm32-info.mk
index 83ee62dd74..c7ea8e547a 100644
--- a/cpu/efm32/efm32-info.mk
+++ b/cpu/efm32/efm32-info.mk
@@ -1,10 +1,6 @@
 # Find the header file that should exist if the CPU is supported.
 EFM32_HEADER = $(wildcard $(RIOTCPU)/efm32/families/*/include/vendor/$(CPU_MODEL).h)
 
-ifeq (,$(EFM32_HEADER))
-  $(error Header file for $(CPU_MODEL) is missing)
-endif
-
 # Lookup up CPU information using grep.
 EFM32_INFO = $(shell grep $(CPU_MODEL) $(shell dirname $(EFM32_HEADER))/../../cpus.txt)
 
diff --git a/cpu/efm32/families/efm32gg/Makefile.include b/cpu/efm32/families/efm32gg/Makefile.include
new file mode 100644
index 0000000000..bf3dceba2b
--- /dev/null
+++ b/cpu/efm32/families/efm32gg/Makefile.include
@@ -0,0 +1,10 @@
+# Find the header file that should exist if the CPU is supported. Only headers
+# for supported boards are included, but to support another CPU, it should be
+# as easy as adding the header file only.
+EFM32_HEADER = $(wildcard $(RIOTCPU)/efm32/families/efm32gg/include/vendor/$(CPU_MODEL).h)
+
+# vectors.o is provided by 'cpu_$(CPU_FAM)' module and not by 'cpu'
+VECTORS_O = $(BINDIR)/cpu_efm32gg/vectors.o
+
+# include vendor device headers
+INCLUDES += -I$(RIOTCPU)/efm32/families/efm32gg/include/vendor
diff --git a/cpu/efm32/families/efm32lg/Makefile.include b/cpu/efm32/families/efm32lg/Makefile.include
new file mode 100644
index 0000000000..736f74d238
--- /dev/null
+++ b/cpu/efm32/families/efm32lg/Makefile.include
@@ -0,0 +1,10 @@
+# Find the header file that should exist if the CPU is supported. Only headers
+# for supported boards are included, but to support another CPU, it should be
+# as easy as adding the header file only.
+EFM32_HEADER = $(wildcard $(RIOTCPU)/efm32/families/efm32lg/include/vendor/$(CPU_MODEL).h)
+
+# vectors.o is provided by 'cpu_$(CPU_FAM)' module and not by 'cpu'
+VECTORS_O = $(BINDIR)/cpu_efm32lg/vectors.o
+
+# include vendor device headers
+INCLUDES += -I$(RIOTCPU)/efm32/families/efm32lg/include/vendor
diff --git a/cpu/efm32/families/efm32pg12b/Makefile.include b/cpu/efm32/families/efm32pg12b/Makefile.include
new file mode 100644
index 0000000000..0fc8605d4b
--- /dev/null
+++ b/cpu/efm32/families/efm32pg12b/Makefile.include
@@ -0,0 +1,10 @@
+# Find the header file that should exist if the CPU is supported. Only headers
+# for supported boards are included, but to support another CPU, it should be
+# as easy as adding the header file only.
+EFM32_HEADER = $(wildcard $(RIOTCPU)/efm32/families/efm32pg12b/include/vendor/$(CPU_MODEL).h)
+
+# vectors.o is provided by 'cpu_$(CPU_FAM)' module and not by 'cpu'
+VECTORS_O = $(BINDIR)/cpu_efm32pg12b/vectors.o
+
+# include vendor device headers
+INCLUDES += -I$(RIOTCPU)/efm32/families/efm32pg12b/include/vendor
diff --git a/cpu/efm32/families/efm32pg1b/Makefile.include b/cpu/efm32/families/efm32pg1b/Makefile.include
new file mode 100644
index 0000000000..056dd3c742
--- /dev/null
+++ b/cpu/efm32/families/efm32pg1b/Makefile.include
@@ -0,0 +1,10 @@
+# Find the header file that should exist if the CPU is supported. Only headers
+# for supported boards are included, but to support another CPU, it should be
+# as easy as adding the header file only.
+EFM32_HEADER = $(wildcard $(RIOTCPU)/efm32/families/efm32pg1b/include/vendor/$(CPU_MODEL).h)
+
+# vectors.o is provided by 'cpu_$(CPU_FAM)' module and not by 'cpu'
+VECTORS_O = $(BINDIR)/cpu_efm32pg1b/vectors.o
+
+# include vendor device headers
+INCLUDES += -I$(RIOTCPU)/efm32/families/efm32pg1b/include/vendor
diff --git a/cpu/efm32/families/efr32mg12p/Makefile.include b/cpu/efm32/families/efr32mg12p/Makefile.include
new file mode 100644
index 0000000000..be38e43843
--- /dev/null
+++ b/cpu/efm32/families/efr32mg12p/Makefile.include
@@ -0,0 +1,10 @@
+# Find the header file that should exist if the CPU is supported. Only headers
+# for supported boards are included, but to support another CPU, it should be
+# as easy as adding the header file only.
+EFM32_HEADER = $(wildcard $(RIOTCPU)/efm32/families/efr32mg12p/include/vendor/$(CPU_MODEL).h)
+
+# vectors.o is provided by 'cpu_$(CPU_FAM)' module and not by 'cpu'
+VECTORS_O = $(BINDIR)/cpu_efr32mg12p/vectors.o
+
+# include vendor device headers
+INCLUDES += -I$(RIOTCPU)/efm32/families/efr32mg12p/include/vendor
diff --git a/cpu/efm32/families/efr32mg1p/Makefile.include b/cpu/efm32/families/efr32mg1p/Makefile.include
new file mode 100644
index 0000000000..d6dc5144d8
--- /dev/null
+++ b/cpu/efm32/families/efr32mg1p/Makefile.include
@@ -0,0 +1,10 @@
+# Find the header file that should exist if the CPU is supported. Only headers
+# for supported boards are included, but to support another CPU, it should be
+# as easy as adding the header file only.
+EFM32_HEADER = $(wildcard $(RIOTCPU)/efm32/families/efr32mg1p/include/vendor/$(CPU_MODEL).h)
+
+# vectors.o is provided by 'cpu_$(CPU_FAM)' module and not by 'cpu'
+VECTORS_O = $(BINDIR)/cpu_efr32mg1p/vectors.o
+
+# include vendor device headers
+INCLUDES += -I$(RIOTCPU)/efm32/families/efr32mg1p/include/vendor