diff --git a/cpu/samd5x/cpu.c b/cpu/samd5x/cpu.c
index 830c0f66e2..a1cf045119 100644
--- a/cpu/samd5x/cpu.c
+++ b/cpu/samd5x/cpu.c
@@ -64,9 +64,14 @@ static void dfll_init(void)
 #endif
     ;
 
-    OSCCTRL->DFLLCTRLB.reg = reg;
-    OSCCTRL->DFLLCTRLA.reg = OSCCTRL_DFLLCTRLA_ENABLE;
+    /* workaround for Errata 2.8.3 DFLLVAL.FINE Value When DFLL48M Re-enabled */
+    OSCCTRL->DFLLMUL.reg   = 0;   /* Write new DFLLMULL configuration */
+    OSCCTRL->DFLLCTRLB.reg = 0;   /* Select Open loop configuration */
+    OSCCTRL->DFLLCTRLA.bit.ENABLE = 1; /* Enable DFLL */
+    OSCCTRL->DFLLVAL.reg   = OSCCTRL->DFLLVAL.reg; /* Reload DFLLVAL register */
+    OSCCTRL->DFLLCTRLB.reg = reg; /* Write final DFLL configuration */
 
+    OSCCTRL->DFLLCTRLA.reg = OSCCTRL_DFLLCTRLA_ENABLE;
     while (!OSCCTRL->STATUS.bit.DFLLRDY) {}
 }
 
@@ -152,8 +157,12 @@ void cpu_pm_cb_enter(int deep)
 
 void cpu_pm_cb_leave(int deep)
 {
-    (void) deep;
     /* will be called after wake-up */
+
+    if (deep) {
+        /* DFLL needs to be re-initialized to work around errata 2.8.3 */
+        dfll_init();
+    }
 }
 
 /**